Windows
Free
PROLITH 13.2
PROLITH uses advanced models to quickly and accurately simulate
Latest version
13.2
Developer
KLA-Tencor Corporation.
Program info
PROLITH lithography simulation tool uses advanced models to quickly and accurately simulate how pattern will print on the wafer for 2Xnm and below design nodes. This computational lithography tool is used by advanced IC manufacturers, stepper companies, track companies, mask manufacturers, material providers and research consortia to cost-effectively evaluate EUV, double patterning and other advanced lithography technologies.
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